Silane Distribution System for Microfabrication Facility

6/1/26 Amendment 01: Notice amended to provide responses to questions received. See attached 'Amendment 01 Q and A 6-1-26.' ***THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE*** The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government’s anticipated needs. If no alternate sources are identified, the Government intends to issue a Sole Source Award to CVD Equipment Corporation, 355, South Technology Drive, Central Islip, NY 11722, US, under the authority of FAR 12.102(a). The North American Industry Classification System (NAICS) code for this acquisition is 333242, Semiconductor Machinery Manufacturing. BACKGROUND The National Institute of Standards and Technology (NIST) has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) in Boulder, CO to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). Among the many critical pieces of equipment in this laboratory is equipment that uses the process gasses silane (SiH4). Silane is a toxic and pyrophoric gas and needs to be stored in and outside bunker using a gas rack and is delivered to tools through a specialized gas valve manifold box (VMB). Recently, the BMF has learned that their existing system has reached end of life and the system needs to be replaced for safety and operational reasons. The Government requires a new silane delivery system that is compatible with its existing life safety equipment, such as the toxic gas monitoring system (TGMS) and other gas cabinets to continue to use silane as process gases. The NIST BMF has many toxic gases that it uses in the process of making its NIST mission critical devices. Among these gases is silane which, for safety reasons, is sourced out of a single bottle in an outside gas bunker. Further distribution through the BMF requires the use of a Valve Manifold Box (VMB). Due to the life safety hazards associated with the toxic gas systems, the BMF has standardized to the Ciphercon platform to ensure it ensuring operators only need to interact with a single, familiar control interface during high-stress emergencies and allows the BMF to have a stable of spare parts to use for the systems. The BMF currently has an installed base of six SDC Ciphercon 1500 toxic gas cabinets, which are fully integrated into our facility's TGMS. Procuring this replacement directly from CVD Equipment Corp is the only way to ensure a seamless platform for safe operation and allow for a clean, straightforward integration with the existing TGMS. NIST conducted market research from March through May 2026 by performing internet searches, reviewing past awards for commissioning of previous systems in the BMF, and speaking with vendors to determine what sources could meet NIST’s minimum requirements. The results of that market research revealed that only CVD Equipment Corporation (UEI: PHV4F6NMWQQ4) appears to be capable of meeting NIST’s requirements. HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice.  Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response. Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI). Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice.  For each product recommended to meet the Government’s requirement, provide the following: Manufacturer name Model number Technical specifications If your company is not the manufacturer, provide information on your company’s status as an authorized reseller of the product(s) Describe performance capabilities of the product(s) your company recommends to meet the Government’s requirements.  Additionally, if there are other features or functions that you believe would assist NIST in meeting its objectives described above, please discuss in your response. Discuss whether the equipment that your company sells and which you describe in your response to this notice may be customized to specifications and indicate any limits to customization. Identify any aspects